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Birck Facility is in Holiday Mode
by Reger, Ronald K 20 Dec '24

20 Dec '24

Dear Birck Research Community - The Birck Nanotechnology Center has now been put into Holiday Mode in which all hazardous gases are turned off. See details below in the announcement we have published several times throughout December. We wish all our Birck family a very restful holiday season and a prosperous new year! We will see you in 2025! -------------------------------------------------------------------------------------- Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and the cleanroom will be open. 2. All hazardous gases will be unavailable. 3. There will be a limited amount of construction continuing during this period but it is not expected to interfere with research work. 4. Cleanroom gowns, hoods, and booties should be used for as long as possible as new items will not be restocked. 5. Any work that uses highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 6. Precursors for ALD systems will be available. 7. No shipping or receiving is being done at any building on campus. 8. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 9. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 20. See the following for more detailed information (this will be up on the BNC Wiki): 2024-12-20 to 2025-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Friday, December 20th until 8:00 AM on Thursday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. * "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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NOTE: Last Reminder: Holiday/Winter Recess Notice
by Reger, Ronald K 19 Dec '24

19 Dec '24

Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and the cleanroom will be open. 2. All hazardous gases will be unavailable. 3. There will be a limited amount of construction continuing during this period but it is not expected to interfere with research work. 4. Cleanroom gowns, hoods, and booties should be used for as long as possible as new items will not be restocked. 5. Any work that uses highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 6. Precursors for ALD systems will be available. 7. No shipping or receiving is being done at any building on campus. 8. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 9. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 20. See the following for more detailed information (this will be up on the BNC Wiki): 2024-12-20 to 2025-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Friday, December 20th until 8:00 AM on Thursday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. * "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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REMINDER: Birck Holiday Party Wednesday 12/18 3:00-5:00
by Hudson, Tracy S 17 Dec '24

17 Dec '24

[cid:6a8f2ac3-f1a9-40ba-a6d1-b6dd23d1f563] Birck Holiday Party Wednesday December 18 at 3:00 p.m. in the Atrium Please bring your favorite holiday snack to share! Special appearance by Santa Tracy Hudson Managing Director| Birck Nanotechnology Center hudsont(a)purdue.edu<mailto:hudsont@purdue.edu> c: 765-404-4805 | BRK 1008 [cid:image001.png@01D5E1BC.DCF172D0]

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Reminder: Holiday/Winter Recess Notice
by Reger, Ronald K 16 Dec '24

16 Dec '24

Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and the cleanroom will be open. 2. All hazardous gases will be unavailable. 3. There will be a limited amount of construction continuing during this period but it is not expected to interfere with research work. 4. Cleanroom gowns, hoods, and booties should be used for as long as possible as new items will not be restocked. 5. Any work that uses highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 6. Precursors for ALD systems will be available. 7. No shipping or receiving is being done at any building on campus. 8. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 9. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 20. See the following for more detailed information (this will be up on the BNC Wiki): 2024-12-20 to 2025-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Friday, December 20th until 8:00 AM on Thursday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. * "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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FW: Holiday party-save the date! 12/18 @3PM
by Black, Nancy Lee 06 Dec '24

06 Dec '24

Birck Holiday Party Wednesday December 18 at 3:00 p.m. in the Atrium [cid:image001.png@01DB47E7.1EE408C0] Please bring your favorite Holiday SNACKS to share

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Holiday/Winter Recess Notice
by Reger, Ronald K 26 Nov '24

26 Nov '24

Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and the cleanroom will be open. 2. All hazardous gases will be unavailable. 3. There will be a limited amount of construction continuing during this period but it is not expected to interfere with research work. 4. Cleanroom gowns, hoods, and booties should be used for as long as possible as new items will not be restocked. 5. Any work that uses highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 6. Precursors for ALD systems will be available. 7. No shipping or receiving is being done at any building on campus. 8. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 9. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 20. See the following for more detailed information (this will be up on the BNC Wiki): 2024-12-20 to 2025-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Friday, December 20th until 8:00 AM on Thursday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. * "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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IEEE EPS: Dr Kristof Croes Virtual Talk on 11/19
by Parimala Vardhan Vydyula 19 Nov '24

19 Nov '24

All, IEEE Electronics Packaging Society is hosting a virtual seminar talk by Dr Kristof Croes on "Reliability challenges for advanced Ru-AG BEOL systems" on Tuesday, November 19th, from 12:00 PM to 1:00 PM. More details about the talk and the speaker are in the flyer attached. The registration link is https://events.vtools.ieee.org/m/445265<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fevents.vt…> Please feel free to reach out to me if you have any questions. Thank you! Best regards, Vardhan __________________________________________ Vardhan Vydyula Graduate Research Assistant Cooling Technologies Research Center School of Mechanical Engineering Purdue University, West Lafayette, IN. Secretary, IEEE EPS Central Indiana Chapter [cid:38efad93-814b-4788-9e20-7a0b3ae6f61c]

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Canceled: Birck Seminar Series, Alina Aleexenko, AAE/Chem.E, "MEMS Micropropulsion for Smallsat"
by Dilley, Neil R 14 Nov '24

14 Nov '24

in BRK 1001 and MS Teams online Coffee and snacks served before seminar ________________________________________________________________________________ Microsoft Teams Need help?<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Faka.ms%2F…> Join the meeting now<https://teams.microsoft.com/l/meetup-join/19%3ameeting_YTkxOWU4NWQtZDI0Ni00…> Meeting ID: 253 488 513 69 Passcode: LfwD44 ________________________________ Dial in by phone +1 219-293-4410,,15091186#<tel:+12192934410,,15091186> United States, Gary Find a local number<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdialin.te…> Phone conference ID: 150 911 86# Join on a video conferencing device Tenant key: purdue(a)m.webex.com<mailto:purdue@m.webex.com> Video ID: 112 906 044 3 More info<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.webex…> For organizers: Meeting options<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fteams.mic…> | Reset dial-in PIN<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdialin.te…> ________________________________________________________________________________

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Birck Seminar Series, Alina Alexeenko, AAE/Chem.E, “MEMS Micropropulsion for Smallsat”
by Dilley, Neil R 14 Nov '24

14 Nov '24

MEMS Micropropulsion for Smallsat Alina Alexeenko Reilly Professor of Aeronautics and Astronautics & Chemical Engineering Wednesday November 20th @ 2:00 pm in BRK 1001 Coffee and snacks served before seminar Microsoft Teams Join the meeting now<https://teams.microsoft.com/l/meetup-join/19%3ameeting_YTkxOWU4NWQtZDI0Ni00…> -- Neil R. Dilley, Ph.D. Research Manager Birck Nanotechnology Center , Rm 1014 1205 Mitch Daniels Blvd. West Lafayette, IN 47907-2057 765-496-6080

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Birck Seminar Series, Alina Aleexenko, AAE/Chem.E, "MEMS Micropropulsion for Smallsat"
by Dilley, Neil R 13 Nov '24

13 Nov '24

in BRK 1001 and MS Teams online Coffee and snacks served before seminar ________________________________________________________________________________ Microsoft Teams Need help?<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Faka.ms%2F…> Join the meeting now<https://teams.microsoft.com/l/meetup-join/19%3ameeting_YTkxOWU4NWQtZDI0Ni00…> Meeting ID: 253 488 513 69 Passcode: LfwD44 ________________________________ Dial in by phone +1 219-293-4410,,15091186#<tel:+12192934410,,15091186> United States, Gary Find a local number<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdialin.te…> Phone conference ID: 150 911 86# Join on a video conferencing device Tenant key: purdue(a)m.webex.com Video ID: 112 906 044 3 More info<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.webex…> For organizers: Meeting options<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fteams.mic…> | Reset dial-in PIN<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fdialin.te…> ________________________________________________________________________________

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