December 2023 - BNC-all - ecn.purdue.edu

Holiday Greetings
by Abrol, Sangeeta Saddul 21 Dec '23

21 Dec '23

[cid:image001.png@01DA3427.961B9590] Dear Birck Research Community, Since it is after 3:30 pm on Dec. 21st we are now in our Holiday/Winter Recess Mode here at the Birck Nanotechnology Center (see below for details). We will remain in this reduced operations mode until Tuesday morning, January 2 at which time we will re-enable the hazardous gases and the Toxic Gas Monitoring System, returning the center to full operation. We wish you all a very happy holiday and a relaxing winter break. See you in 2024! Birck Management Staff ___________________ Announcement On behalf of the Birck Leadership Team……. Dear Birck Research Community, The Purdue winter recess begins Friday December 22rd and concludes Tuesday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and cleanroom will be open. 2. All hazardous gases will be unavailable. 3. Any work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 4. Precursors for ALD systems will be available. 5. No shipping or receiving is being done at any building on campus. 6. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 7. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 21. See the following for more detailed information (this will be up on the BNC Wiki): 2023-12-22 to 2024-01-02: Reduced Holiday Operations Due to Purdue’s Winter Recess hazardous gases will be unavailable from 3:30 PM Thursday, December 21st until 8:00 AM on Tuesday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the “buddy” system). Please note the following changes to our normal operation: o ALD sources will remain available • Unavailable gases: • Ammonia (NH3) • Boron trichloride (BCl3) • Chlorine (Cl2) • Dichlorosilane (H2Cl2Si) • Hydrogen (H2) • Hydrogen Sulfide (H2S) • Krypton Fluoride (KrF) • Methane (CH4) • Nitric Oxide (NO) • Silane (SiH4) • Trichlorosilane (HCl3Si) • Tools affected: • Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) • Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) • Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. • Custodial staff will not be working. • There will be no restocking of shared use supplies. • There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. o “Preliminary” reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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We are Now in Holiday/Winter Recess Mode
by Reger, Ronald K 21 Dec '23

21 Dec '23

Dear Birck Research Community, Since it is after 3:30 pm on Dec. 21st we are now in our Holiday/Winter Recess Mode here at the Birck Nanotechnology Center (see below for details). We will remain in this reduced operations mode until Tuesday morning, January 2 at which time we will re-enable the hazardous gases and the Toxic Gas Monitoring System, returning the center to full operation. We wish you all a very happy holiday and a relaxing winter break. See you in 2024! Birck Management Staff ___________________ Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins Friday December 22rd and concludes Tuesday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and cleanroom will be open. 2. All hazardous gases will be unavailable. 3. Any work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 4. Precursors for ALD systems will be available. 5. No shipping or receiving is being done at any building on campus. 6. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 7. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 21. See the following for more detailed information (this will be up on the BNC Wiki): 2023-12-22 to 2024-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Thursday, December 21st until 8:00 AM on Tuesday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. o "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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2023 BNC Hero research image contest
by Abrol, Sangeeta Saddul 20 Dec '23

20 Dec '23

Hello All - We are pleased to announce that the image contest has been extended to January 31st. 2023 Birck Nanotechnology Center Hero Research Image Contest Deadline Extended to January 31, 2024 Sponsored by NSAC and Birck leadership This year the theme is Hero Images from your work here at Birck - your best sample, breakthrough data, or something you're especially proud of. As always, all the Birck community is invited to contribute. Please provide a short paragraph explaining what we are looking at and why it is a "hero" for you. Student hero image entries are eligible to win cash prizes! If you have any striking villain images, the enemies of your heroes, you are invited to submit these as well (but they will not likely garner cash prizes!). Deadline for submissions: January 31, 2024 Where to submit: new MS Teams channel "2023 BNC research image contest" (under the EVPRP-Birck-O-NSAC Team), or using this link: https://teams.microsoft.com/l/channel/19%3a3df0ac4cac554d64bdc32dcfcff4bb8f…<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fteams.mic…> If you have issues or questions, please email Neil Dilley at ndilley(a)purdue.edu<mailto:ndilley@purdue.edu> . Happy image hunting! -- Neil R. Dilley, Ph.D. Research Manager Birck Nanotechnology Center , Rm 1014 1205 Mitch Daniels Blvd. West Lafayette, IN 47907-2057 765-496-6080

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Another Reminder: Holiday/Winter Recess Notice
by Reger, Ronald K 20 Dec '23

20 Dec '23

Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins Friday December 22rd and concludes Tuesday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and cleanroom will be open. 2. All hazardous gases will be unavailable. 3. Any work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 4. Precursors for ALD systems will be available. 5. No shipping or receiving is being done at any building on campus. 6. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 7. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 21. See the following for more detailed information (this will be up on the BNC Wiki): 2023-12-22 to 2024-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Thursday, December 21st until 8:00 AM on Tuesday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. o "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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Reminder: Holiday/Winter Recess Notice
by Reger, Ronald K 18 Dec '23

18 Dec '23

Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins Friday December 22rd and concludes Tuesday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and cleanroom will be open. 2. All hazardous gases will be unavailable. 3. Any work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 4. Precursors for ALD systems will be available. 5. No shipping or receiving is being done at any building on campus. 6. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 7. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 21. See the following for more detailed information (this will be up on the BNC Wiki): 2023-12-22 to 2024-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Thursday, December 21st until 8:00 AM on Tuesday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. o "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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FW: SPIE Callouts
by Abrol, Sangeeta Saddul 12 Dec '23

12 Dec '23

Hello all, The SPIE Purdue University Student Chapter is hosting an Information Session/ Callout on Thursday, Dec 14 from 1-2PM in BRK 2001. Come join us to learn about what SPIE does and the opportunities it can provide. We will also be selecting officers for the next year. There will be pizza too! Best, SPIE Purdue University Student Chapter

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FW: 2023 BNC Hero research image contest
by Abrol, Sangeeta Saddul 05 Dec '23

05 Dec '23

Hello All, 2023 Birck Nanotechnology Center Hero Research Image Contest Entries due by December 14, 2023 Sponsored by NSAC and Birck leadership This year the theme is Hero Images from your work here at Birck - your best sample, breakthrough data, or something you're especially proud of. As always, all the Birck community is invited to contribute. Please provide a short paragraph explaining what we are looking at and why it is a "hero" for you. We will assemble a panel of judges and announce awards at the BNC Holiday Party on December 15. Student hero image entries are eligible to win cash prizes! If you have any striking villain images, the enemies of your heroes, you are invited to submit these as well (but they will not likely garner cash prizes!). Deadline for submissions: December 14, 2023 Where to submit: new MS Teams channel "2023 BNC research image contest" (under the EVPRP-Birck-O-NSAC Team), or using this link: https://teams.microsoft.com/l/channel/19%3a3df0ac4cac554d64bdc32dcfcff4bb8f…<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fteams.mic…> If you have issues or questions, please email Neil Dilley at ndilley(a)purdue.edu<mailto:ndilley@purdue.edu> . Happy image hunting! -- Neil R. Dilley, Ph.D. Research Manager Birck Nanotechnology Center , Rm 1014 1205 Mitch Daniels Blvd. West Lafayette, IN 47907-2057 765-496-6080

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Holiday/Winter Recess Notice
by Reger, Ronald K 04 Dec '23

04 Dec '23

Announcement On behalf of the Birck Leadership Team....... Dear Birck Research Community, The Purdue winter recess begins Friday December 22rd and concludes Tuesday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Following is a description of the Birck center during this period of university closure: 1. All labs and cleanroom will be open. 2. All hazardous gases will be unavailable. 3. Any work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. 4. Precursors for ALD systems will be available. 5. No shipping or receiving is being done at any building on campus. 6. The custodians will not be working so restrooms will not be maintained and waste/trash will not be removed. o We encourage users to keep the facility clean and be extra vigilant about the hygiene. 7. Due to the lack of staffing, any faculty and senior researchers present are encouraged to be more proactive (e.g. occasional walk-throughs checking the labs where there is ongoing research). Email sejurss(a)purdue.edu<mailto:sejurss@purdue.edu> if you notice anything. Since there will be very limited staff support during this winter recess the research groups are strongly encouraged to accomplish as much processing as possible before gases are turned off on Dec. 21. See the following for more detailed information (this will be up on the BNC Wiki): 2023-12-22 to 2024-01-02: Reduced Holiday Operations Due to Purdue's Winter Recess hazardous gases will be unavailable from 3:30 PM Thursday, December 21st until 8:00 AM on Tuesday, Jan 2nd. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Please note the following changes to our normal operation: o ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: o PVD Nitride Sputtering System (NH3 unavailable) o Tube 1 Clean Ox (H2 unavailable, dry oxidation only) o Tube 4 Field OX (H2 unavailable, dry oxidation only) o Tube 7 General Oxidation (H2 unavailable, dry oxidation only) o Panasonic (Cl2 and BCl3 unavailable) o Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: o Axic PECVD (NH3 & SiH4 unavailable) o Easy Tube 3000 DVD (CH4 unavailable) o Epigress (SiH4 unavailable) o H2S CVD (H2S & H2 unavailable) o Nitric Oxide Anneal (NO unavailable) o Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) o Tube 2 Nitride (NH3 and HCl3Si unavailable) o Tube 3 LTO (SiH4 unavailable) o Tube 6 Polysilicon (SiH4 unavailable) * Work with highly dermally toxic materials (25% TMAH, BOE, HF) ABSOLUTELY requires a buddy within eyesight at all times. * Custodial staff will not be working. * There will be no restocking of shared use supplies. * There will be no availability of engineering staff to answer questions or repair down equipment. o On metallization tools sources will not be changed and depositions must be < 200 nm. o "Preliminary" reservations that require staff approval will not be approved during this time. Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions.

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REMINDER: Upcoming Seminar by Prof. Ya-Ping, Chiu from National Taiwan University
by Abrol, Sangeeta Saddul 01 Dec '23

01 Dec '23

From: Abrol, Sangeeta Saddul Sent: Thursday, November 30, 2023 11:34 AM To: bnc-all(a)ecn.purdue.edu Subject: REMINDER: Upcoming Seminar by Prof. Ya-Ping, Chiu from National Taiwan University Hello All - Zoom Link: https://purdue-edu.zoom.us/j/96640538773<https://nam04.safelinks.protection.outlook.com/?url=https%3A%2F%2Fpurdue-ed…> [cid:image002.png@01DA243D.46B36D60] Best, Sangeeta Abrol Lead Administrative Assistant to the Director | Birck Nanotechnology Center 1205 Mitch Daniels Blvd. | West Lafayette, IN 47907 abrols(a)purdue.edu<mailto:abrols@purdue.edu> |purdue.edu/discoverypark/birck<https://nam04.safelinks.protection.outlook.com/?url=http%3A%2F%2Fpurdue.edu…> o: 765-494 3509 | BRK 1027 [cid:image001.png@01D5E1BC.DCF172D0]

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