- Bnc-facility-notice - ecn.purdue.edu

NOTICE - WEST LAB WING USERS ONLY
by Voorhis, Mark L. 26 May '22

26 May '22

Dear West Lab Wing Users, There has been an air handler water leak detected on the third floor of the West lab wing that requires an emergency shutdown of the air handling systems to isolate and fix the source of the leak. This Involves losing humidity and temperature control for the West Lab Wing ONLY. Areas shown in yellow below are the only labs effected from this interruption. We will provide updates as we investigate the issue. Sorry for the very short notice Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 [cid:image003.png@01D865FD.5F0209D0]

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Birck back to normal operations
by Jurss, Stephen E 11 May '22

11 May '22

Birck Users, The upgrade to the Toxic Gas Monitoring System (TGMS) has been completed. All gases are back online and operation per pre-shut-down conditions Thank you for your patience, Stephen Birck Safety Manager

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NOTICE - Birck Nanotechnology Center PM Closure - Restricted Operations for Toxic & Bulk HP Gases
by Voorhis, Mark L. 06 May '22

06 May '22

Dear Birck Research Community, We are sorry for the delay announcement due to several unforeseen issues. The preventive maintenance closure of the Birck Nanotechnology Facility has been completed. The cleanroom and laboratories are now open for limited operations. Some equipment is still down for maintenance, or is in the process of being started back up. Please check iLabs for individual equipment status. Unfortunately the TGMS system will not be operational until future notice. During this PM closure period the TGMS system was scheduled to have a hardware and software upgrade to completed by the end of this week. The upgrade didn't go as planned and the engineering company overseeing the upgrade will be working through the weekend to evaluate the TGMS system. Due to the TGMS upgrade setback the hazardous gases will not be unavailable until further notice. Additionally the new microbulk tanks for Ar and Oxygen are still being debugged so Ar and O2 are only available in very limited quantities. Using these gases in processing is prohibited until the microbulk tanks are online. * ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: * PVD Nitride Sputtering System (NH3 unavailable) * Tube 1 Clean Ox (H2 unavailable, dry oxidation only) * Tube 4 Field OX (H2 unavailable, dry oxidation only) * Tube 7 General Oxidation (H2 unavailable, dry oxidation only) * Panasonic (Cl2 and BCl3 unavailable) * Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: * Axic PECVD (NH3 & SiH4 unavailable) * Easy Tube 3000 DVD (CH4 unavailable) * Epigress (SiH4 unavailable) * H2S CVD (H2S & H2 unavailable) * Nitric Oxide Anneal (NO unavailable) * Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) * Tube 2 Nitride (NH3 and HCl3Si unavailable) * Tube 3 LTO (SiH4 unavailable) * Tube 6 Polysilicon (SiH4 unavailable) Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions regarding the TGMS system. Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036

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NOTICE - Campus Steam is Off Line - Cooler Cleanroom & Lab Temperatures
by Voorhis, Mark L. 01 May '22

01 May '22

Dear BNC User, This evening at 7:15 PM there was a power interruption that caused the campus steam and chilled water to shut down across campus. The campus chilled water to the center is operating at normal levels since the BNC center's chilled water is supplied from the north chiller plant that was not affected. But the steam pressure coming into the center is at 0 psi (normal is 120psi). Due to the loss of steam we are starting to see cooler temperatures in the general labs and cleanroom space. If the steam does not come back on line we could see temperatures cool off down to 55° F in general lab and cleanroom spaces. This will also have a direct impact on the cleanroom and general lab humidity as well. This issue is outside the control of the BNC building operations, but we will continue to monitor building system and will provide updates as conditions change. Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036

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NOTICE - Chilled Water Shutdown - POSTPONED
by Voorhis, Mark L. 14 Mar '22

14 Mar '22

Dear BNC Research Community, The scheduled campus chilled water interruption for tomorrow morning @ 7AM has been postpone to a later date and will not be completed. Best Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Voorhis, Mark L. Sent: Thursday, March 10, 2022 3:55 PM To: bnc-facility-notice(a)ecn.purdue.edu Subject: RE: Revised: Chilled Water Shutdown Dear BNC Research Community, Based on feedback the interruption it is scheduled for Tuesday March 15, 2022 starting at 7:00 AM. Best Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Voorhis, Mark L. Sent: Thursday, March 10, 2022 1:57 PM To: bnc-facility-notice(a)ecn.purdue.edu<mailto:bnc-facility-notice@ecn.purdue.edu> Subject: FW: Revised: Chilled Water Shutdown Importance: High Dear BNC Research Community, The Purdue Physical Facility Department has been trying to track down a major campus chilled water leak. To investigate and find the source of the leak there will be a required short interruption of the campus chilled water supply to the center. During the interruption we will be monitoring building control systems closely to ensure that no negative impact is noticed to the research cleanroom and laboratories with contingency plans in place. If conditions start trending out of control, we will have direct contact with Physical Facility Department to restore campus chilled water to the center if needed. Process cooling water to all research equipment will continue to operate as normal for water flow and pressure to all research systems in the center. We will be monitoring the temperature of the process cooling water loop during this interruption. Based on past campus chilled water interruptions we do not see this being an issue to help support Physical Facilities Department to find this leak. Please let me know if you have any questions or concerns. Best regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Remaly, Teresa D Sent: Thursday, March 10, 2022 1:16 PM To: Arnett, Joseph A <jaarnett(a)purdue.edu<mailto:jaarnett@purdue.edu>> Subject: Revised: Chilled Water Shutdown [cid:image001.png@01D837AF.605446D0]

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FW: Revised: Chilled Water Shutdown
by Voorhis, Mark L. 10 Mar '22

10 Mar '22

Dear BNC Research Community, The Purdue Physical Facility Department has been trying to track down a major campus chilled water leak. To investigate and find the source of the leak there will be a required short interruption of the campus chilled water supply to the center. During the interruption we will be monitoring building control systems closely to ensure that no negative impact is noticed to the research cleanroom and laboratories with contingency plans in place. If conditions start trending out of control, we will have direct contact with Physical Facility Department to restore campus chilled water to the center if needed. Process cooling water to all research equipment will continue to operate as normal for water flow and pressure to all research systems in the center. We will be monitoring the temperature of the process cooling water loop during this interruption. Based on past campus chilled water interruptions we do not see this being an issue to help support Physical Facilities Department to find this leak. Please let me know if you have any questions or concerns. Best regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Remaly, Teresa D Sent: Thursday, March 10, 2022 1:16 PM To: Arnett, Joseph A <jaarnett(a)purdue.edu<mailto:jaarnett@purdue.edu>> Subject: Revised: Chilled Water Shutdown [cid:image001.png@01D8347F.74C8B070]

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Humidity Control: Cleanroom and General Labs
by Hosler, Daniel A 03 Mar '22

03 Mar '22

Dear BNC Users, Over the winter months, our low-temp chiller has been out of service waiting on parts for repair. The low-temp chiller is responsible for controlling high-humidity situations in the cleanroom and general lab spaces when outdoor temperatures go above 60°F. During the winter months, humidity control can be maintained without the low-temp chiller, but with warmer weather on the way, we may see higher than normal humidity levels within Birck. The parts for the repair have been on order for many weeks, and the vendor is still experiencing supply-chain issues. Tentatively, the parts to repair the chiller are due to arrive the week of March 14. We wanted to prepare you for this possible humidity issue, and we will inform you when the chiller is fully operational. Please don't hesitate to reply with any questions or concerns. Thank you, Dan Hosler Research Facility Planning Engineer Birck Nanotechnology Center | Room 2287C Office: 765.496.3883 | Email: dhosler(a)purdue.edu

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FW: NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption - UPDATE
by Hosler, Daniel A 02 Mar '22

02 Mar '22

This is a friendly reminder regarding the shutdown tomorrow morning, March 2 2022, at 8am. Please read on below for full details. Thank you, Dan Hosler Research Facility Planning Engineer Birck Nanotechnology Center | Room 1120 Office: 765.496.3883 | Email: dhosler(a)purdue.edu From: Bnc-facility-notice <bnc-facility-notice-bounces(a)ecn.purdue.edu> On Behalf Of Voorhis, Mark L. Sent: Thursday, February 24, 2022 6:44 AM To: bnc-facility-notice(a)ecn.purdue.edu Subject: Re: [Bnc-facility-notice] NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption - UPDATE Dear BNC Cleanroom and Ultra-Pure Water Users, This is a reminder and an update for our scheduled power interruption for March 2, 2022 starting at 8AM. Additionally the entire cleanroom space humidity control will be down due to the loss of ultrapure water required for cleanroom humidity control. Any cleanroom research that requires tight cleanroom humidity control needs to pause and be protected during this interruption. Below is the revised scope for the power interruption. [cid:image002.png@01D82949.D64D6F20] Thank you, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Voorhis, Mark L. Sent: Monday, February 21, 2022 8:19 AM To: bnc-facility-notice(a)ecn.purdue.edu<mailto:bnc-facility-notice@ecn.purdue.edu> Subject: RE: NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption Dear BNC Cleanroom and Ultra-Pure Water Users, The start time for the March 2 power interruption communicated below will start at 8:00AM on March 2, 2022 and lasting up to 8 hours based on no unforeseen issues. Thank you, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Voorhis, Mark L. Sent: Tuesday, January 25, 2022 4:40 PM To: bnc-facility-notice(a)ecn.purdue.edu<mailto:bnc-facility-notice@ecn.purdue.edu> Subject: NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption Dear BNC Cleanroom and Ultra-Pure Water Users, On March 2, 2022 starting at 9AM we are planning for a power interruption to add power for a major project in our bio cleanroom. As a result we have to power down the northeast quadrant of the sub fab and cleanroom areas (image below). The ultra-pure water system will have to be power down resulting in a shutdown of all UPW water for all labs and cleanroom areas. At this time we are planning that the power outage with the ultra-pure water recovery time could last 24 hours, but we hoping that this time can be shorten when more information becomes available as we approach March 2, 2022. Please let me know if you have any questions or concerns. Best Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 [cid:image001.png@01D82947.EC46A820]

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Re: [Bnc-facility-notice] NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption - UPDATE
by Voorhis, Mark L. 24 Feb '22

24 Feb '22

Dear BNC Cleanroom and Ultra-Pure Water Users, This is a reminder and an update for our scheduled power interruption for March 2, 2022 starting at 8AM. Additionally the entire cleanroom space humidity control will be down due to the loss of ultrapure water required for cleanroom humidity control. Any cleanroom research that requires tight cleanroom humidity control needs to pause and be protected during this interruption. Below is the revised scope for the power interruption. [cid:image002.png@01D82949.D64D6F20] Thank you, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Voorhis, Mark L. Sent: Monday, February 21, 2022 8:19 AM To: bnc-facility-notice(a)ecn.purdue.edu Subject: RE: NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption Dear BNC Cleanroom and Ultra-Pure Water Users, The start time for the March 2 power interruption communicated below will start at 8:00AM on March 2, 2022 and lasting up to 8 hours based on no unforeseen issues. Thank you, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 From: Voorhis, Mark L. Sent: Tuesday, January 25, 2022 4:40 PM To: bnc-facility-notice(a)ecn.purdue.edu<mailto:bnc-facility-notice@ecn.purdue.edu> Subject: NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption Dear BNC Cleanroom and Ultra-Pure Water Users, On March 2, 2022 starting at 9AM we are planning for a power interruption to add power for a major project in our bio cleanroom. As a result we have to power down the northeast quadrant of the sub fab and cleanroom areas (image below). The ultra-pure water system will have to be power down resulting in a shutdown of all UPW water for all labs and cleanroom areas. At this time we are planning that the power outage with the ultra-pure water recovery time could last 24 hours, but we hoping that this time can be shorten when more information becomes available as we approach March 2, 2022. Please let me know if you have any questions or concerns. Best Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 [cid:image001.png@01D82947.EC46A820]

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NOTICE - Ultra-Pure Water and Cleanroom Equipment Power Interruption
by Voorhis, Mark L. 21 Feb '22

21 Feb '22

Dear BNC Cleanroom and Ultra-Pure Water Users, On March 2, 2022 starting at 9AM we are planning for a power interruption to add power for a major project in our bio cleanroom. As a result we have to power down the northeast quadrant of the sub fab and cleanroom areas (image below). The ultra-pure water system will have to be power down resulting in a shutdown of all UPW water for all labs and cleanroom areas. At this time we are planning that the power outage with the ultra-pure water recovery time could last 24 hours, but we hoping that this time can be shorten when more information becomes available as we approach March 2, 2022. Please let me know if you have any questions or concerns. Best Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 [cid:image002.png@01D8120A.37E24BE0]

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