May 2022 - Bnc-facility-notice

All hazardous Gases are shut-down
by Jurss, Stephen E 31 May '22

31 May '22

All, Just a clarification that only the Hazardous gases are offline. Nitrogen, argon, oxygen and carbon dioxide are still on. Stephen Birck safety Manager

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All Hazardous Gases Down
by Jurss, Stephen E 31 May '22

31 May '22

Users, We are experiencing a malfunction of the Toxic Gas Monitoring system (TGMS). All gases will be off until proper corrective action has been completed. You will be notified as soon as the corrective action has been completed. My apologies for the inconvenience, Stephen Jurss Birck Safety Manager

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NOTICE - WEST LAB WING USERS ONLY
by Voorhis, Mark L. 26 May '22

26 May '22

Dear West Lab Wing Users, There has been an air handler water leak detected on the third floor of the West lab wing that requires an emergency shutdown of the air handling systems to isolate and fix the source of the leak. This Involves losing humidity and temperature control for the West Lab Wing ONLY. Areas shown in yellow below are the only labs effected from this interruption. We will provide updates as we investigate the issue. Sorry for the very short notice Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036 [cid:image003.png@01D865FD.5F0209D0]

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Birck back to normal operations
by Jurss, Stephen E 11 May '22

11 May '22

Birck Users, The upgrade to the Toxic Gas Monitoring System (TGMS) has been completed. All gases are back online and operation per pre-shut-down conditions Thank you for your patience, Stephen Birck Safety Manager

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NOTICE - Birck Nanotechnology Center PM Closure - Restricted Operations for Toxic & Bulk HP Gases
by Voorhis, Mark L. 06 May '22

06 May '22

Dear Birck Research Community, We are sorry for the delay announcement due to several unforeseen issues. The preventive maintenance closure of the Birck Nanotechnology Facility has been completed. The cleanroom and laboratories are now open for limited operations. Some equipment is still down for maintenance, or is in the process of being started back up. Please check iLabs for individual equipment status. Unfortunately the TGMS system will not be operational until future notice. During this PM closure period the TGMS system was scheduled to have a hardware and software upgrade to completed by the end of this week. The upgrade didn't go as planned and the engineering company overseeing the upgrade will be working through the weekend to evaluate the TGMS system. Due to the TGMS upgrade setback the hazardous gases will not be unavailable until further notice. Additionally the new microbulk tanks for Ar and Oxygen are still being debugged so Ar and O2 are only available in very limited quantities. Using these gases in processing is prohibited until the microbulk tanks are online. * ALD sources will remain available * Unavailable gases: * Ammonia (NH3) * Boron trichloride (BCl3) * Chlorine (Cl2) * Dichlorosilane (H2Cl2Si) * Hydrogen (H2) * Hydrogen Sulfide (H2S) * Krypton Fluoride (KrF) * Methane (CH4) * Nitric Oxide (NO) * Silane (SiH4) * Trichlorosilane (HCl3Si) * Tools affected: * Reduced capability: * PVD Nitride Sputtering System (NH3 unavailable) * Tube 1 Clean Ox (H2 unavailable, dry oxidation only) * Tube 4 Field OX (H2 unavailable, dry oxidation only) * Tube 7 General Oxidation (H2 unavailable, dry oxidation only) * Panasonic (Cl2 and BCl3 unavailable) * Plasma-Therm Apex SLR ICP RIE Etcher (H2, Cl2 and BCl3 unavailable) * Shutdown: * Axic PECVD (NH3 & SiH4 unavailable) * Easy Tube 3000 DVD (CH4 unavailable) * Epigress (SiH4 unavailable) * H2S CVD (H2S & H2 unavailable) * Nitric Oxide Anneal (NO unavailable) * Plasma-Therm Apex SLR HDPCVD (SiH4 unavailable) * Tube 2 Nitride (NH3 and HCl3Si unavailable) * Tube 3 LTO (SiH4 unavailable) * Tube 6 Polysilicon (SiH4 unavailable) Contact Steve Jurss (sejurss(a)purdue.edu<mailto:sejurss@purdue.edu>) with any questions regarding the TGMS system. Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036

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NOTICE - Campus Steam is Off Line - Cooler Cleanroom & Lab Temperatures
by Voorhis, Mark L. 01 May '22

01 May '22

Dear BNC User, This evening at 7:15 PM there was a power interruption that caused the campus steam and chilled water to shut down across campus. The campus chilled water to the center is operating at normal levels since the BNC center's chilled water is supplied from the north chiller plant that was not affected. But the steam pressure coming into the center is at 0 psi (normal is 120psi). Due to the loss of steam we are starting to see cooler temperatures in the general labs and cleanroom space. If the steam does not come back on line we could see temperatures cool off down to 55° F in general lab and cleanroom spaces. This will also have a direct impact on the cleanroom and general lab humidity as well. This issue is outside the control of the BNC building operations, but we will continue to monitor building system and will provide updates as conditions change. Regards, Mark Voorhis Building Manager Purdue University Birck Nanotechnology Center Office: (765) 494-3036

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