16 Jan
2009
16 Jan
'09
6:13 a.m.
Due to a failure in both the primary and backup fans on the scrubbed exhaust, the cleanroom scrubbed exhaust is not functional. This results in no process gases being available as well, as all gas cabinets are shut down. Please do not use any acid hoods in the cleanroom, or any equipment that is connected to scrubbed exhaust. I will let you know when the condition has been corrected. Thank you for your cooperation, John John R. Weaver Facility Manager Birck Nanotechnology Center Purdue University (765) 494-5494 jrweaver@purdue.edu
