Due to a failure in both the primary and backup fans on the
scrubbed exhaust, the cleanroom scrubbed exhaust is not functional. This
results in no process gases being available as well, as all gas cabinets are
shut down.
Please do not use any acid hoods in the cleanroom, or any equipment
that is connected to scrubbed exhaust.
I will let you know when the condition has been corrected.
Thank you for your cooperation,
John
John
R. Weaver
Facility
Manager
Birck
Nanotechnology Center
Purdue
University
(765)
494-5494
jrweaver@purdue.edu