All,
We will be testing the Cl & BCl3 Vertex points on the 8-inch PlasmaTherm etcher and retesting the TGMS Expertech LEL today starting at 1:00pm. The horns and strobes will be muted (and monitored) until the testing is completed.
Regards,
Harlan, Rich
Senior Research Engineer
Birck Nanotechnology Center | Room 2287C
Office: 765.494.6697 | Email: rharlan(a)purdue.edu<mailto:rharlan@purdue.edu>
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