All,

We will be testing the Cl & BCl3 Vertex points on the 8-inch PlasmaTherm etcher and retesting the TGMS Expertech LEL today starting at 1:00pm. The horns and strobes will be muted (and monitored) until the testing is completed.

Regards,

Harlan, Rich

Senior Research Engineer

Birck Nanotechnology Center | Room 2287C

Office: 765.494.6697 | Email: rharlan@purdue.edu