Dear all, Our multi-million-dollar electron-beam lithography system has finally passed the acceptance tests and is now commissioned! Starting from today till Sept. 15th, Vistec engineers will start a two-week long training session. While the hands-on training is limited to four people, there are a significant portion of the training that is lecture style. Vistec engineers have graciously agreed to have an extra lecture this evening on the overview of e-beam lithography and on the tool installed in Birck. I would encourage those of you who are interested in using e-beam lithography to attend this lecture. For your convenience, I have attached a pdf version of the lecture notes. Time: 6:30pm-9pm TODAY! Location: BRK 2001 The operation of the VB6-UHR tool is quite complicated and we will probably limit the number of people who can operate the machine at this moment. However, several aspects of the e-beam lithography, such as estimating how long the exposure takes, setting up job files and layouts, are essential to everyone who wants to take advantage of the e-beam lithography. Cheers, Minghao