Cleanroom Humidity Change on Friday
8 Nov
2007
8 Nov
'07
10:37 a.m.
Please note that the cleanroom humidity will be out of specified limits on Friday during the ultrapure water outage. This can impact various operations, but can have a very pronounced affect on photo-speed in lithography operations utilizing POSITIVE PHOTORESIST. Thank you again for your patience and cooperation, John Weaver John R. Weaver Facility Manager Birck Nanotechnology Center Purdue University (765) 494-5494 jrweaver@purdue.edu
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John Weaver