HEAT TRANSFER FACULTY CANDIDATE SEMINAR April 9, 2012 10:30am Room ME 2054 Liang Pan, PhD Department of Mechanical Engineering University of California, Berkeley Mechanics and Energy Transfer in Scalable Nano-Manufacturing Abstract: Nanomanufacturing provides the crucial engineering supports for many current and emerging applications, including semiconductor, data storage, alternative energy, biology and healthcare. There have been many exciting and significant findings in this field, however many scientific and engineering challenges have to be tackled in order for them to enter real world applications. At nanoscale many classical laws and theories start to break down and some other effects start to arise, bringing much of great opportunities and challenges in engineering research, particularly in the size range of 1~100 nm according to current trend of technology progression. This seminar reports a new low-cost high-throughput maskless nanomanufacturing approach, aiming as the enabling technique for breaking optical diffraction limits in the future applications, which uses arrays of plasmonic lenses (PLs) that "fly" above the rotating surface to be thermally processed, concentrating short wavelength surface plasmons into deep sub-wavelength scales. A self-spacing air-bearing surface was designed to carry the array just a few nanometers above a substrate at linear speeds of tens of meter per second. Experimental results showed feature sizes far smaller than the far-field diffraction limit reaching state-of-the-art 22-nm half-pitch direct material processing capability using ultra-fast laser assisted nanoscale heat management and progressive multistage PL designs. This nanomanufacturing scheme has the potential of a few orders of magnitude higher throughput than current maskless techniques, and opens a new cost effective route towards the next generation nano-manufacturing. Besides patterning and material processing, this nearfield technique can also lead to niche applications such as data storage, nanoscale metrology and imaging, and alternative energy. Bio: Dr. Liang Pan is currently a postdoctoral researcher in the NSF’s Nano-scale Science and Engineering Center (NSEC) for Scalable and Integrated Nanomanufacturing (SINAM). Dr. Pan earned his M.S. and Ph.D. in Mechanical Engineering from University of California at Berkeley in 2009 and 2010. Before joining Berkeley, he received his B.S. and M.E. in Mechanics and Mechanical Engineering from University of Science and Technology of China. There will be a 30 minute open discussion after the seminar.