The following tools will be shutting down two days earlier than the other cleanroom tools for the Spring Maintenance shut down, starting the morning of Thursday April 25.    This is necessary due to activities associated with the cleanroom modernization project:

Tergeo Plasma Cleaner

March Jupiter 2

Plasma-Therm Etcher

Panasonic Etcher

PVD – 1

Kind regards,

Francis

Francis R. Manfred
Sr Etch Research Engineer

Purdue University
Birck Nanotechnology Center | Room 2287C | Purdue University
Office: 765.494.6522 | Email: fmanfred@purdue.edu
Wiki: https://wiki.itap.purdue.edu/display/BNCWiki
iLab: https://purdue.ilabsolutions.com