[BNC-all] MSEE 289

On Monday of next week (July 31st) the following systems will be packaged and readied for move to the Birck Center. The systems are as follows: CHA - electron Beam evaporator, Suss mask aligner, and the RIE. Both the RIE and CHA systems are in desperate need of maintenance and the maintenance will be done in Birck before the systems are brought up to running state. The mask aligner will be down for approximately 3 days, the CHA and RIE for several weeks. The Varian and Airco evaporators are up and running in the Birck cleanroom. We will do everything in our power to shorten the downtime of moving these systems. Dave Lubelski