Greetings all, this afternoon’s Fab Forum will open with equipment status updates, follow with Dr. Tony Cofer from Prof.
Alina Alexeenko’s group talking about successes and struggles with their
Film Evaporation MEMS Tunable Array (FEMTA) – Heater Liftoff Lithography, and then open up for Open Forum discussion. Tony’s challenging process involves lithography and metallization on sloped features. While this pushes what is possible with standard
fabrication techniques, challenges such as gap fill, adhesion, and lift-off quality are similar to issues other groups are currently seeing or have seen in the past. Please stop by if you’re able to share your experience or to get ideas for how to solve your
current problems.
Light snacks will be served along with:
Coffee of the week: Sumatran, medium roast
Tea of the week: Jasmine green
For those who were unable to attend last week, discussion has been posted on BNCWiki:
https://wiki.itap.purdue.edu/display/BNCWiki/Fab+Forum+2018-11-05
Thanks, we hope to see you there,
Justin
Justin C. Wirth
Research Engineer – EBL Processes & Nanofab Process Consultation
Birck Nanotechnology Center | Room 2287A | Purdue University
Office:
765.494.8203 | Email:
jcwirth@purdue.edu
Wiki: https://wiki.itap.purdue.edu/display/BNCWiki
iLab: https://purdue.ilabsolutions.com
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