DATE:

FROM:  Hasan Sharifi, John Weaver

TO:  BNC Community

SUBJECT:  Replacement of Triode Etcher

As you are probably aware, the Drytek Triode RIE has been inoperable for some time, and we are not able to obtain the part necessary to fix the system.  This system is approximately twenty years old, and has not been supported by the manufacturer for many years.

Through joint startup funds of two faculty members, however, we have been able to obtain a new Panasonic ICP RIE which can run both fluorine and chlorine chemistries.  This new, far more dependable system will have significantly enhanced capabilities over the old system, and will be able to run at very low pressures – less than 10 mTorr.  We look forward to the new Panasonic etcher significantly increasing our etch capability in BNC.  We expect delivery of the Panasonic system prior to the end of 2007.

To begin this process, the Triode etcher will be dismantled beginning the week of July 30, 2007.  Please let either of us know if you have questions or concerns regarding this replacement.