Dr.
Dana
Weinstein
Massachusetts
Institute
of
Technology
RF
Solid-State
MEMS
Resonators
Monday,
October
6, 2014
10:00
a.m.
Birck
Nanotechnology
Center
Room
1001
Abstract
Semiconductor
micro-electromechanical
(MEM)
resonators,
with
quality
factors
(Q)
often
exceeding
104
can provide
a high
performance,
low-power,
compact
alternative
to
electrical
components
in wireless
communication
and
signal
processing.
The
seamless
integration
of
these
MEM
devices
in
standard
IC technology
is
particularly
attractive
due
to
reduced
size,
weight,
and
power,
reduced
parasitics
leading
to higher
operational
frequencies,
and
relaxed
constraints
on
impedance
matching
networks.
In this
talk,
I will
discuss
the
design
innovations
in transduction
and
acoustic confinement
that
enabled
the
demonstration
of
solid-state
MEMS
resonators
in standard
Si
CMOS
and
GaN
MMIC
technologies.
This
work
has
led
to the
highest
f.Q
products
in both
Si
and
GaN
reported
to
date,
to
record-breaking
resonance
frequencies
in Si,
and
to
the first
monolithic
MEMS
oscillators
in GaN.
I will
discuss the
methods
used
to
achieve
this
performance,
including
active electromechanical
transduction,
2D
and
3D
phononic
crystal
design,
and
modeling
used
to
optimize
these
unique
structures.
Bio
Dana
Weinstein
is an
Associate
Professor in the
Department
of
Electrical
Engineering
and
Computer Science
at
MIT,
and a
member
of the
Microsystems Technology
Laboratories.
Dana
received
her
B.A.
in Physics
and
Astrophysics
from
UC Berkeley
in 2004,
then
moved
to
Cornell
University
where
she
completed
her
Ph.D.
in
Applied
Physics
in 2009,
working
on multi-GHz
Micro
Electro-Mechanical
Systems
(MEMS).
Her
research
group
at
MIT,
the
HybridMEMS
Lab,
focuses
on
the development
of
novel
MEMS-enhanced
electron
devices
and
systems
for
high
performance,
low
power consumption,
programmable
electromechanical
signal
processors
operating
in real
time at
carrier
frequencies.
Dana
is
the
recipient
of
the NSF CAREER
Award,
the
DARPA
Young
Faculty
Award,
the
Intel
Early
Career
Award,
and
the
IEEE
IEDM
Roger
A.
Haken
Best
Paper
Award.
Karen Jurss | Assistant to Venkataramanan Balakrishnan,
Michael and Katherine Birck Head & Professor
School of Electrical & Computer Engineering | Purdue University
465 Northwestern Avenue, Room 122C | West Lafayette, IN 47907
phone: 765-494-3539 | email:
kjurss@purdue.edu