Dear Birck Users,
The UPW experienced a significant leak in one of the de-gas membrane housings and leaked water onto the subfab floor. The system is totally shut down until engineering can evaluate the situation and provide the appropriate recovery. Humidification of the cleanroom uses UPW but with current weather conditions we don't believe this will be a significant issue.
We will keep you notified of progress, but it may be down until at least Monday afternoon and perhaps beyond that.
Thank you for your patience as we work through this issue.
Ron
